The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 1992
Filed:
Nov. 21, 1990
Applicant:
Inventors:
Gerald L Goff, Austin, TX (US);
Michael L Muecke, Austin, TX (US);
Assignee:
Advanced Micro Devices, Austin, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05B / ; B65G / ;
U.S. Cl.
CPC ...
364478 ; 36416701 ; 414416 ; 414417 ; 414404 ;
Abstract
A method and apparatus for lifting select semi-conductor wafers from a quartz wafer boat. A removable transfer platform is provided for receiving a quartz wafer boat and positioning the wafer boat above upwardly extending fingers adapted for engaging wafers disposed therein. The upwardly extending wafer engagement fingers are mounted on a wand that is programmed for select vertical and horizontal movement relative to the wafer boat. The fingers of the wand also include ends adapted for engaging the peripheral edges of the wafer supported within the wafer boat for being lifted therefrom.