The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 1992

Filed:

May. 07, 1991
Applicant:
Inventors:

Yigal Katzir, Holon, IL;

Oded Arnon, Givatayim, IL;

Eyal Teichman, Rehovot, IL;

Assignee:

Orbot Systems Ltd., Yavne, IL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
356237 ;
Abstract

Optical inspection apparatus includes an illumination system illuminating an area of the workpiece surface with a sky of illumination which is, with respect to each point in the illuminated area, substantially circularly symmetric over a solid angle around the optical axis passing perpendicularly through the electro-optical sensor and the workpiece surface.


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