The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 1992
Filed:
Dec. 18, 1990
Jolyon P Willson, Andover, GB;
Schlumberger Industries Limited, Farnborough, GB;
Abstract
In an optically-excited micromachined silicon pressure sensor comprising a resonantly vibrating beam mounted on a diaphragm, vibration of the beam is sensed optically via the same optical fibre through which the optical excitation signal is applied to the sensor. The end of the fibre and the beam are arranged to define a cavity or gap whose width varies with vibration of the beam and which behaves as a Fabry-Perot cavity: thus light from the fibre is directed onto the beam and then reflected back to the fibre, the reflected light being modulated at the frequency of vibration of the beam. In order to overcome the difficulty of setting the gap or cavity width at an optimum value for light of a given wavelength, light of two different wavelengths is used to sense the vibrations, the wavelengths being selected such that the phase difference produced by the gap for one wavelength differs from that for the other wavelength by roughly 90.degree..