The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 1992
Filed:
Oct. 05, 1990
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
A method and an apparatus for measuring a displacement between two objects. Corresponding pairs of regions of the two objects each have at least one diffraction grating which generate two-dimensionally distributed diffracted light beams. These light beams are diffracted and caused to interfere with each other in the paired regions, whereby two-dimensionally distributed diffracted interference light beams are emitted. A light beam of a specific order is detected from each of these diffracted interference light beams, and is converted into a beat signal. The displacement is obtained in accordance with the phase difference between these beat signals.
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