The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 1992
Filed:
Apr. 27, 1990
Applicant:
Inventors:
Kuniyoshi Tanaka, Yokohama, JP;
Shunji Shirouzu, Ayase, JP;
Minoru Ohta, Tokyo, JP;
Hideo Miyagawa, Yokohama, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
324458 ; 324457 ;
Abstract
In a system for measuring a surface potential of a sample, a probe is located above. A surface of the sample with a small gap and is vibrated by a piezoelectronic element which is energized by a oscillator. A potential of the distal end of the probe is changed and is converted into an electrical signal. The surface potential is obtained from the electrical signal.