The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 1992
Filed:
Dec. 12, 1990
Nobuaki Furuya, Kawasaki, JP;
Takuhiro Ono, Zama, JP;
Naoya Horiuchi, Kawasaki, JP;
Keiichiro Yamanaka, Kawasaki, JP;
Takeo Miyata, Zama, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
A laser apparatus comprises an optical resonator including first and second mirrors, and laser medium. An wavelength selection element is provided in the resonator for narrowing band-width. A polarizing conversion element for changing ratio of S to P components and polarizing beam splitter are provided for amplifying laser beam to output after wavelength selection and for reducing light load of the wavelength selection element. The polarizing conversion element is provided in the resonator light path. In another embodiment, the polarizing conversion element is provided in a branch light path formed by a second polarizing conversion element and a third mirror, where the second polarizing conversion element reflects and transmits P component at a given ratio and reflects S component. The wavelength selection element comprises a Fabry-Perot etalon, grating, or prism. The polarizing conversion element comprises a quarter-wave plate or a phase retarder mirror. The polarizing beam splitting element comprises a polarizing beam splitter or polarizing beam splitting prism. Such laser apparatus is suited for an exposure light source for photolithography.