The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 1992
Filed:
Jul. 01, 1991
Applicant:
Inventors:
Shih-Ying Lee, Lincoln, MA (US);
Sen Z Li, Acton, MA (US);
Assignee:
Setra Systems, Inc., Acton, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01G / ;
U.S. Cl.
CPC ...
361283 ; 73724 ;
Abstract
A capacitance pressure sensor includes a conductive diaphragm positioned between two pneumatically separate regions. The diaphragm is supported at its periphery by a concave base member. An electrode assembly establishes a substantially planar conductive surface opposite to, and spaced apart by a nominal gap from, the conductive diaphragm. The electrode assembly includes the conductive surface and a plurality of support legs extending through, and secured at, apertures in the base member.