The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 1992
Filed:
Nov. 08, 1991
Applicant:
Inventors:
Dietrich Erdmann, Muhltal, DE;
Max E Van Ghemen, Darmstadt, DE;
Ludwig Pohl, Darmstadt, DE;
Herbert Schumann, Berlin, DE;
Uwe Hartmann, Berlin, DE;
Wilfried Wassermann, Berlin, DE;
Meino Heyen, Aachen, DE;
Holger Jurgensen, Aachen, DE;
Assignee:
Merck Patent Gesellschaft mit beschraenkter Haftung, Darmstadt, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07F / ; C07F / ; C07F / ;
U.S. Cl.
CPC ...
556-1 ; 556 19 ; 556 20 ; 556 22 ; 556 30 ; 556174 ; 556 27 ; 546-4 ; 546-5 ; 548102 ; 548103 ;
Abstract
In a process for the production of thin films and epitaxial layers by gas-phase deposition, intramolecularly stabilized organometallic compounds are employed as a source of metal.