The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 1992
Filed:
Dec. 04, 1991
Takeshi Igarashi, Kanagawa, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A measured molecular beam intensity V.sub.i is converted into a value V.sub.iO at a reference temperature T.sub.O by calculating the following equation using the measured molecular beam intensity V.sub.i and a measured cell temperature T.sub.i : V.sub.iO =V.sub.i .multidot.exp(A(1/T.sub.O -1/T.sub.i)). Next, a molecular beam intensity V.sub.O (t) at a time (t) is estimated after the last conversion time based on the reference temperature T.sub.O in accordance with the converted molecular beam intensity V.sub.iO and a corresponding time t.sub.i thereof. Further, the temperature of a molecular beam source cell is controlled in accordance with an estimated cell temperature T.sub.SP (V.sub.SP), to realize a predetermined molecular beam intensity V.sub.SP, given by calculating the following equation using the estimated molecular beam intensity V.sub.O (t) and the predetermined molecular beam intensity V.sub.SP : T.sub.SP (V.sub.SP)=1/(1/T.sub.O +(log(V.sub.SP /V.sub.O (t)))/A).