The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 1992
Filed:
Dec. 27, 1991
Keishi Tada, Kanagawa, JP;
Sony Corporation, , JP;
Abstract
A semiconductor wafer transfer device includes a rotary member, a driving member which rotates coaxially with the rotary member, a driven member which is driven by the driving member and a frog leg linkage having a first link with an end fixed to the driving member, a second link with an end fixed to the driven member, a third link having an end pivotally joined to another end of the first link, and a fourth link having an end pivotally joined to the other end of the second link. A wafer support plate is supported on the other ends of the third and fourth links. An auxiliary escape mechanism is provided for moving the frog leg linkage out of its dead point. The mechanism includes a first pulley coaxillary fixed to the rotary member with the driving member, a second pulley rotatably supported on a pivot shaft pivotally joining the first and the third links, and a belt wound around the first and second pulleys. The radius of the first pulley is greater than the center distance between the driving member and the driven member. The diameter of the second pulley is smaller than that of the first pulley.