The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 1992
Filed:
Dec. 14, 1989
Hidenori Suwa, Zushi, JP;
Shinichi Ono, Chigasaki, JP;
Hiroyuki Hirano, Hiratsuka, JP;
Humio Naruse, Yokohama, JP;
Nihon Shinku Gujutsu Kabushiki Kaisha, Chigasaki, JP;
Abstract
A loading and unloading airlock apparatus for a vacuum treatment chamber which includes an airlock chamber, a transport mechanism inside the chamber to transport a substrate holder arranged to have substrates detachably mounted thereon, an exhaust port to evacuate the chamber to a vacuum, a gas inlet port to introduce a gas to bring the evacuated chamber back to atmospheric pressure, a rectifying plate provided in the chamber adjacent to and at a predetermined distance away from the substrate holder on that side of the substrate holder upon which the substrates are detachably mounted, and a gas introduction pipe having a gas ejection outlet in said chamber for introducing additional gas in a space defined by the predetermined distance to flow along the surfaces of the substrates and the substrate holder.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile