The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 1992
Filed:
Jul. 19, 1991
Isabelle Thomas, Valence, FR;
Pierre O Lefort, Valence, FR;
Sextant Avionique, Meudon-la-Foret, FR;
Abstract
A pressure microsensor comprises, between two plates in an insulating material: a bottom silicon plate (3) forming a base; a middle silicon plate (2) constituting a diaphragm (11) surrounded by a frame (12), a first part (15) of a stud being formed at a decentred location of the diaphragm; and a top silicon plate (1) comprising a frame (17) corresponding to that of the middle plate, a second parts (16) of said stud and a silicon blade (18) constituting a resonator connecting the top of the stud to a high area of the frame. A measuring interval (13) is provided between the diaphragm and the bottom plate, this interval comprising an access (14, 28), and the two insulating plates (4, 5) cooperate with the border of the three assembled silicon plates to form a closed cavity.