The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 1992
Filed:
Feb. 09, 1990
Applicant:
Inventors:
Toshio Hirai, Izumi, JP;
Hisanori Yamane, Sendai, JP;
Assignee:
Sumitomo Metal Mining Co., Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ; C23C / ;
U.S. Cl.
CPC ...
4272553 ; 4272552 ; 427314 ;
Abstract
A chemical vapor deposition method is disclosed for forming a dense and transparent or semitransparent zirconia film on a substrate which has substantially one or two kinds of particular planes such as (200), (111) or (111) planes only oriented in parallel to the surface of the substrate.