The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 1992
Filed:
Jan. 04, 1991
James E Basso, Hopewell Junction, NY (US);
Parmesh K Bhalla, Pleasant Valley, NY (US);
John J Chahine, Poughkeepsie, NY (US);
Daro Diddell, San Diego, CA (US);
Gregory J Earle, Wallkill, NY (US);
Edward P Gabriel, Newburgh, NY (US);
Farrokh Yaghmaie, Hopewell Junction, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An apparatus for cleaning and drying workpieces which comprises a closable chamber, means for introducing a cleaning solvent to the chamber, means for removing the solvent from the chamber, means for introducing an inert gas to the chamber, means for receiving workpieces and for moving the workpieces with respect to the level of the solvent, and means for transmitting megasonic energy with respect to the solvent.