The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 1992
Filed:
Oct. 25, 1990
Hans-Jurgen Cirkel, Uttenreuth, DE;
Willi Bette, Erlangen, DE;
Siemens Aktiengesellschaft, Munich, DE;
Abstract
Preionization is important for the generation of a homogeneous glow discharge in the gas space of a laser chamber between laser electrodes. TE type excimer lasers operate especially with X-ray preionization, for which high voltage pulses are needed. According to the present invention, the voltage pulses are obtained by means of an auxiliary circuit that includes a branch which is connected in parallel with a high voltage switch or with the laser discharge gap and which incorporates a saturable magnetic inductance and the primary winding of a high voltage pulse transformer connected in series therewith. The high voltage triggering pulses for the preionization element, which is an X-ray tube in particular, are generated in the secondary winding of the transformer. If the branch is connected in parallel with the high voltage switch it also has a series capacitor. If it is in parallel with the laser discharge gap then the branch has a shunt capacitor. In this way, the timing of the preionization and in particular the X-ray pulse, can be adjusted precisely in relation to the voltage rise time through the laser electrodes and in relation to the laser.