The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 1992
Filed:
Dec. 21, 1990
Eric G Hanson, Burlingame, CA (US);
Si-Ty Lam, San Jose, CA (US);
William J West, Los Altos, CA (US);
Hewlett-Packard Company, Palo Alto, CA (US);
Abstract
An apparatus and method for cooling a large-area, pass-through projection mask for excimer ablation. In a preferred embodiment, a laser-transparent window is spaced apart from the projection mask to provide a thermal escape path. The thermal escape path receives a liquid flow which is in direct contact with patterned masking material of the projection mask. The liquid, preferably deionized water, is caused to flow in a laminar fashion. The liquid intersects the laser energy of the excimer laser. In a second embodiment, the liquid flow is along the periphery of the patterned masking material.