The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 1992
Filed:
Sep. 06, 1991
Mitsuzo Shimomura, Minami, JP;
Masao Yamaguchi, Minami, JP;
Stec Inc., Kyoto, JP;
Abstract
The output from the sensor detecting the flow rate of the fluid passing through the conduit is compared with the ceiling value and the appointed compensating signal is added to the output from the sensor to display the signal obtained on the basis of this addition result as the value of flow rate or reduce the openness of the control valve on the basis of the above described signal when the output from the sensor is larger than the threshold value, so that the mass flow meter can accurately display the flow rate even when the fluid passes in an excessive flow rate. In addition, even though the mass flow meter and the mass flow controller are fallen into the abnormal operating condition due to an excessive flow rate of fluid, they can be quickly returned to the normal operating condition.