The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 1992
Filed:
Feb. 05, 1990
Applicant:
Inventors:
Leonard W Foster, Richardson, TX (US);
Edwin G Millis, Dallas, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05K / ;
U.S. Cl.
CPC ...
141 98 ; 414217 ; 25044111 ; 206334 ; 2065248 ;
Abstract
A vacuum storage cassette for semiconductor wafers has one or more valves to allow the cassette to be evacuated, backfilled, and opened to the surround atmosphere and resealed without the need for a vacuum load-lock chamber.