The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 1992
Filed:
Jun. 13, 1990
Carlo Misiano, Rome, IT;
Enrico Simonetti, Rome, IT;
Consorzio Ce.Te.V Centro Tecnologie del Vuoto, Carsoli-L'Aquila, IT;
Abstract
Apparatus and process for loading substrates into an evacuable fore-chamber and registering the substrates with an opening in a vacuum treatment chamber to which the fore-chamber is attached. The fore-chamber is removably attached to a an external surface of a wall of the vacuum treatment chamber such that an opening in a wall of the fore-chamber is registered with an opening in the wall of the vacuum treatment chamber. A rotatable plate lying along the wall of the fore-chamber has a plurality of substrate holders each dimensioned to register with the opening in the vacuum treatment chamber. Rotation of the plate enables sequential exposure of the substrates to the vacuum treatment chamber for treatment without breaking the vacuum in the vacuum treatment chamber.