The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 1992
Filed:
Mar. 28, 1991
Akihiko Nakano, Nara, JP;
Sharp Kabushiki Kaisha, , JP;
Abstract
An apparatus for checking a semiconductor comprising an X-Y stage for movably holding a semiconductor chip in terms of X-Y coordinates, a charged particle beam radiating device for radiating a charged particle beam on the semiconductor chip held in the X-Y stage to generate secondary electrons therefrom, a detecting device for detecting secondary electrons emitted from the semiconductor, a magnifying device for displaying an enlarged image of the semiconductor chip on the basis of data of the detected secondary electrons, a semiconductor tester for measuring electrical characteristics of the semiconductor chip to specify a defective element of circuit elements constituting the semiconductor chip on the basis of a result of the measurement, a defective portion locating device provided with table data of a layout pattern showing the relationship between the circuit elements constituting the semiconductor chip and the arrangement thereof, for obtaining on the basis of the table data position data of the defective circuit element specified by the semiconductor tester, and a control device for issuing instructions to operate the X-Y stage, charged particle beam radiating device, and magnifying device, and further to cause the charged particle beam radiating device to impress marks on the semiconductor chip for indicating a position of the defective circuit element in positions apart from the defective circuit element at predetermined spaces by the charged particle beam radiation on the basis of the position data of the defective circuit element obtained by the defective portion locating device.