The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 1992
Filed:
May. 16, 1991
Applicant:
Inventors:
Victor J Adams, Tempe, AZ (US);
Ronald J Gutteridge, Paradise Valley, AZ (US);
Assignee:
Motorola Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437225 ; 437228 ; 437238 ; 437241 ; 437927 ; 156657 ; 148D / ;
Abstract
A method of fabricating a surface micromachined structure is comprised of the steps of providing a semiconductor substrate having a dynamic element partially supported above the semiconductor substrate by a release layer and having a metal contact layer disposed on the dynamic element, forming a protection layer over the metal contact layer, and removing the release layer and the protection layer with an etchant that etches the protection layer at a slower rate than the release layer.