The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 1992
Filed:
Nov. 13, 1990
Applicant:
Inventors:
Mitsuzo Shimomura, Miyanohigashi, JP;
Masao Yamaguchi, Miyanohigashi, JP;
Assignee:
Stec Inc., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D / ;
U.S. Cl.
CPC ...
137486 ; 1374875 ;
Abstract
An improved mass flow controller can be connected to a passageway of a fluid, and can utilize a sensor unit for measuring a characteristic of the mass flow, and deriving a corresponding flow rate signal. Supplemental condition sensors can measure other parameters of the flow rate independent of their utilization in determining the actual flow rate, and can monitor and compare the current value of these sensor conditions, with standards to thereby monitor the operational performance of the mass flow controller.