The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 1992
Filed:
Aug. 10, 1990
Applicant:
Inventors:
Assignees:
Toyota Jidosha Kabushiki Kaisha, Toyota, JP;
Kabushiki Kaisha Toyota Chuo Kenkyusho, Aichi, JP;
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
428681 ; 428433 ; 428936 ; 148403 ;
Abstract
A metal target and a substrate are disposed in confronting relationship in a vacuum chamber whose interior is kept at high vacuum, and laser light is irradiated to the surface of the target to emit a high-speed evaporated material from the target. The high-speed evaporated material is then deposited on the substrate. By applying a predetermined voltage between the target and the substrate, the impact energy of the charged particles in the evaporated material on the substrate are controlled to form an amorphous metal film preferably a pure iron film.