The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 1992
Filed:
Jun. 03, 1991
Sudarshan Lal, Glen Rock, NJ (US);
Craig G Smith, Bridgewater, NJ (US);
AT&T Bell Laboratories, Murray Hill, NJ (US);
Abstract
This invention is a process for etching copper sheets on insulating boards for use in fabricating multilayer printed circuit boards. The improvement resides in adding to a standard copper etching solution certain alkyltrimethyl ammonium chlorides with alkyl chain lengths ranging from 6 to 20 carbon atoms in amounts sufficient to yield intermediate kinetics behavior. Of special interest are dodecyltrimethyl ammonium chloride, hexadecyltrimethyl ammonium chloride and octadecyltrimethyl ammonium chloride present in an amount of from 0.01 to 1.0 wt %. A silicon-based antiforming agent may be added in amounts of from 0.05 to 2.0 wt. % to prevent an unacceptably large amount of foam from occurring during etching. With this formulation, the rate is mass transport controlled at low rates and almost independent of mass transport at high rates due to the inhibition of the surface reaction rate. As a result, non-uniformities in etch rates due to variations in mass transport conditions in processing equipment may be eliminated. This unique formulation could significantly improve the yields presently obtained in manufacturing as well as allow the processing of fine-line multilayer circuit boards.