The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 1992
Filed:
Mar. 13, 1991
Applicant:
Inventors:
John R Gavaler, Penn Hills Township, Allegheny County, PA (US);
Timothy T Braggins, Churchill Borough, PA (US);
Assignee:
Westinghouse Electric Corp., Pittsburgh, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; C23C / ;
U.S. Cl.
CPC ...
505-1 ; 20419224 ; 505731 ;
Abstract
A superconducting film is deposited in a closed, non-baked reactor (10) containing a sputtering gas comprising O.sub.2 with H.sub.2 O vapor addition to preferably provide a total H.sub.2 O vapor pressure of between 3.times.10.sup.-3 mbar to 266.times.10.sup.-3 mbar, where a copper oxide-based target material (15) is used and the deposition substrates (16) are maintained between 550.degree. C. and 800.degree. C.