The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 1992
Filed:
May. 30, 1989
Applicant:
Inventors:
James D Paulsen, Tempe, AZ (US);
Mark D Griswold, Chandler, AZ (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B / ;
U.S. Cl.
CPC ...
156603 ; 156600 ; 156605 ; 156D / ; 156D / ; 437238 ; 437239 ;
Abstract
A method for forming high quality oxides wherein semiconductor material is placed in an oxidizing environment and subjected to a predetermined concentration of oxygen. This oxygen concentration is increased over time until a predetermined amount of oxide has been formed. Once the predetermined amount of oxide has been formed, the semiconductor material/oxide interface is subjected to a burst of steam that passivates the interface thereby reducing the number of unreacted semiconductor material atoms.