The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 1992
Filed:
Feb. 06, 1991
Applicant:
Inventor:
Noriyuki Kondo, Kyoto, JP;
Assignee:
Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ; G01B / ;
U.S. Cl.
CPC ...
250372 ; 250341 ; 356381 ; 356357 ;
Abstract
Light in the ultraviolet region is applied toward a transparent thin film of an object sample to measure energy of light reflected by the object sample. On the basis of the measured energy value, the thickness of the transparent thin film on the object sample can thus be correctly measured even if the film thickness is not more than 10 nm. In the preferred embodiment, an optical system is included to enable monitoring of a position of the thin transparent film. In one aspect of the invention visible light reflected from the transparent film is used to form an image to facilitate such monitoring.