The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 1992
Filed:
Mar. 12, 1991
Christopher B Davis, Suffield, CT (US);
Mott Metallurgical Corporation, Farmington, CT (US);
Abstract
An ultra-high efficiency particulate air filter for use in the microelectronics manufacturing industry is formed as a fully homogeneous sintered metal filter that exhibits an efficiency substantially in excess of a 6 log reduction and preferably equal to or exceeding a 9 log reduction (an efficiency of 99.9999999%). The filter can be used as a process gas in-line filter in state of the art gas supply systems. The porous metal filter exhibits long term stability relative to mechanical or thermal stress and operates within the desired ultra-high efficiency levels even under high pressure conditions. It does not exhibit an outgassing problem and there is no particle shedding. These features are provided within a unit no larger than those conventionally employed heretofore with organic membranes and under substantially identical operating conditions.