The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 1992

Filed:

Dec. 14, 1989
Applicant:
Inventors:

Nobuaki Andoh, Hyogo, JP;

Osamu Ueda, Hyogo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
357 234 ; 357 236 ; 357 238 ; 357 235 ;
Abstract

A non-volatile semiconductor memory device includes a substrate (1) having a plurality of element-forming regions (3), a plurality of recesses (32) located between the element-forming regions (3), and a plurality of element-isolating regions (31); word lines (8a to 8d); bit lines (10) orthogonal to this word lines; and memory cells (511) each formed at the point of intersection of these word and bit lines at each element-forming region (3). Each memory cell (511) includes an electrically floating electrode (5) in the form of a flat plate, a control gate electrode (7) in the form of a substantially flat plate formed on the floating gate electrode (5) and connected to the word lines (8a to 8d), and a pair of impurity regions (21, 23) formed respectively at opposite sides of the floating gate electrode (5) on the surface of a semiconductor substrate (1). An element-isolating region (31) includes an element-isolating electrode layer (30) formed on the surface of the semiconductor substrate (1) and in the recesses (32).


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