The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 1992
Filed:
Jan. 22, 1991
Yasuhiko Matsumoto, Shizuoka, JP;
Yamaha Corporation, Hamamatsu, JP;
Abstract
A process of fabricating a multi-level wiring structure starts with preparation of a semiconductor substrate covered with a lower insulating film, and comprises the steps of forming lower-level wiring strips on the lower insulating film, covering the lower-level wiring strips and exposed portions of the lower insulating film with a first intermediate insulating film, coating the entire surface with an organic glass film, removing the organic film except for pieces of the organic glass film in valleys between the lower-level wiring strips, coating the entire surface with an inorganic glass film, removing the inorganic glass film except for pieces of the inorganic glass film on the pieces of the organic glass film, covering the entire surface with a second intermediate insulating film, and forming upper-level wiring strips on the intermediate insulating film, wherein the pieces of the inorganic glass film prevent the upper-level wiring strips from corrosion due to water vapor produced from the pieces of the organic glass film.