The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 1992
Filed:
Dec. 13, 1990
Applicant:
Inventors:
Assignee:
Brewer Science Inc., Rolla, MO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F / ; G03F / ;
U.S. Cl.
CPC ...
430 14 ; 430 18 ; 430271 ; 430323 ; 430313 ;
Abstract
A photolithographic composition having improved processability and which eliminates the need for inter layering multiple special purpose coatings in the production of micro-electronic devices is surprisingly made possible by selective dissolution of poly(vinylpyridine) and an effective light attenuating material in critical solvents.