The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 1992
Filed:
Sep. 14, 1990
Applicant:
Inventor:
William C Albert, Boonton, NJ (US);
Assignee:
Lucas Schaevitz Inc., Pennsauken, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
310321 ; 310312 ; 310323 ; 310329 ; 7351 / ; 7351 / ;
Abstract
A monolithic resonator structure for a vibrating beam force sensor, comprising an accelerometer and pressure transducer, is provided which comprises an outer structure including a mounting structure, a force transfer structure, a plurality of flexure beams extending between the mounting and force transfer structures; and an inner structure including a vibrating beam extending between the mounting structure and the force transfer structure. The monolithic resonator is non-planar in that the outer structure has a thickness greater than said inner structure.