The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 1992
Filed:
May. 25, 1990
Applicant:
Inventors:
Christl Lauterbach, Siegertsbrunn, DE;
Helmut Albrecht, Munich, DE;
Assignee:
Siemens Aktiengesellschaft, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
357 30 ; 357 22 ; 357 58 ;
Abstract
A photodiode-FET combination having an optimized layer structure wherein the photodiode and the FET are separated from one another by a separating trench and are separated from the substrate by barrier layers forming a pn-junction in order to avoid tributary currents. A layer sequence is provided formed of an absorption layer grown on in surface-wide fashion, of a photodiode layer that is likewise grown on in surface-wide fashion and which is etched back to the region of light incidence in the region of the photodiode, of a channel layer in the region of the FET, and of a cover layer on the channel layer which forms a gate.