The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 1992
Filed:
Apr. 05, 1991
Nippon Telegraph & Telephone Corporation, Tokyo, JP;
Abstract
An ion beam is impinged against a solid sample to sputter neutrals. The neutrals thus sputtered are ionized by a UV laser beam to obtain photoions. The photoions are guided to a quadrupole mass analyzer through an ion extraction electrode to extract ions having a desired mass. The extracted ions are made incident upon an ion detector to derive ion pulses. The number of ion pulses is counted by a counter through a signal gate which is opened only during a time period that the photoions reaches the ion detector. A mass of the neutrals having a desired mass is analyzed from the counted value in the digital manner. A time period required for extracting the photoions is extended to perform the pulse counting without being influenced by the secondary ions which causes noises, so that the mass analysis can be performed with a high sensitivity.