The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 1992
Filed:
Oct. 18, 1990
Applicant:
Inventor:
Ronald J Gutteridge, Paradise Valley, AZ (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
357 25 ; 357 26 ; 357 27 ; 310329 ;
Abstract
A micro-mechanical sensor having a field effect transistor formed in a proof mass portion of a substrate is provided. The proof mass portion is attached to a support portion of the substrate by a means for flexing such as a diaphragm or cantilever beam. A gate electrode is formed over a channel region of the field effect transistor and separated from the channel region by a gap whereby force applied to the sensor causes the proof mass portion to move towards the gate electrode due to flexing of the flexing means. As the channel region moves closer to the gate electrode, current flows through the field effect transistor generating an output signal.