The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 1992
Filed:
Nov. 22, 1989
Applicant:
Inventors:
Jacques H Pelletier, Le Murier, FR;
Yves A Arnal, Poisat, FR;
Laurent J Vallier, Meylan, FR;
Michel G Pichot, Grenoble, FR;
Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D / ; H01L / ; B44C / ;
U.S. Cl.
CPC ...
427 38 ; 427 39 ; 156643 ; 156627 ;
Abstract
This invention relates to a process for surface treatment of a substrate carried by an electrode and immersed in a sealed engraving or deposition chamber equipped with plasma generating means, of the type involving the application to the electrodes, of a variable voltage, produced by a generator that is independent of the plasma generating means, wherein said process comprises the steps of: