The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 1992
Filed:
May. 26, 1989
Shinobu Ezaki, Ibaraki, JP;
Masaie Tokai, Ryugasaki, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A continuous vacuum processing apparatus has at least one preliminary vacuum chamber respectively disposed in front of and rear of a vacuum processing chamber. The preliminary vacuum chamber is provided with a slit-shaped seal for sealing the vacuum processing chamber from outside. The preliminary vacuum chamber which is located closest to the atmosphere is provided with an adjusting valve for adjusting the evacuation rate. Alternatively, the preliminary vacuum chamber which is located closest to the atmosphere is shorter that other preliminary vacuum chambers.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile