The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 1992
Filed:
Jan. 16, 1990
Applicant:
Inventors:
Toshihiko Yoshida, Nara, JP;
Osamu Yamamoto, Nara, JP;
Assignee:
Sharp Kabushiki Kaisha, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B / ;
U.S. Cl.
CPC ...
359566 ; 385-4 ; 385129 ; 430296 ; 430321 ;
Abstract
A method for producing a diffraction grating in optical elements with an optical waveguide is disclosed which comprises the steps of: forming a transparent conductive film on the optical waveguide; forming an electron beam resist film on said transparent conductive film; drawing a diffraction grating pattern on said resist film with an electron beam; and developing said resist film with a diffraction grating pattern drawn thereon to form a resist film of the diffraction grating pattern.