The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 1992
Filed:
Jul. 07, 1989
Wataru Wakamiya, Hyogo, JP;
Ikuo Ogoh, Hyogo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A DRAM having stacked capacitor cell comprises one transfer gate transistor and one capacitor. A thick insulating film having flat surface is formed on the surface of the transfer gate transistor and the like. A conductive film is formed on a surface of one impurity region of the transfer gate transistor. An opening portion deep enough to reach the conductive film is formed in the insulating film. The capacitor is formed in the opening portion and on the upper surface of the insulating film. A lower electrode of the capacitor is connected to the conductive film. An insulating film having a flat surface is formed by a reflow process employing thermal processing, plasma ECR CVD method and the like.