The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 1992
Filed:
Jul. 06, 1990
Applicant:
Inventor:
Noriyuki Kondo, Kyoto, JP;
Assignee:
Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01V / ;
U.S. Cl.
CPC ...
250560 ; 356382 ;
Abstract
Prior to measurement of the thickness dx of a thin film which is formed on a substrate, correlation data between the reflectance Rs of the film for light and the thickness dx thereof is stored in a data memory in the form of a table. A reference sample having a known reflectance Rp is prepared and the energy Ep of light reflected from the reference sample is measured. Also measured is the energy Es of light reflected from an objective sample having the thin film and the substrate. A value of the thickness dx is obtained through the table while setting Y=Rp therein, where y is calculated through a fomula y=(Rp/Ep).multidot.Es.