The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 1992
Filed:
Jun. 08, 1990
Alan D Nolet, Los Altos, CA (US);
Lloyd F Wright, Castro Valley, CA (US);
Robert A Maraschin, Cupertino, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A system for delivering a liquid reagent to a low pressure reactor in the vapor phase includes a source of the liquid reagent, a metering valve for measuring precise volumes of the liquid reagent and transporting those volumes to an expansion valve at a precisely controlled flow rate, and a vaporizing chamber. The expansion valve includes an adjustable orifice which is adjusted in response to pressure disturbances upstream of the expansion valve so as to decrease variations of the liquid flow rate to the expansion valve and thereby enhance uniformity of the vapor phase flow rate downstream of the expansion valve.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile