The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 1992
Filed:
Dec. 31, 1990
Applicant:
Inventors:
John A Norman, Whitehall, PA (US);
Paul N Dyer, Allentown, PA (US);
Assignee:
Air Products and Chemicals, Inc., Allentown, PA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ; C23F / ;
U.S. Cl.
CPC ...
156666 ; 156646 ; 156654 ; 156655 ; 156656 ; 156664 ; 427250 ; 427252 ; 427253 ; 4272554 ;
Abstract
A process is provided for selectively depositing copper films on metallic or other electrically conducting portions of substrate surfaces by contacting the substrate at a temperature from 110.degree. to 190.degree. C. with a volatile organometallic copper complex, in the gas phase, represented by the structural formula: ##STR1## wherein R.sup.1 and R.sup.3 are each independently C.sub.1 -C.sub.8 perfluoroalkyl, R.sup.2 is H or C.sub.1 -C.sub.8 perfluoroalkyl and L is carbon monoxide, an isonitrile, or an unsaturated hydrocarbon ligand containing at least one non-aromatic unsaturation.