The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 1992
Filed:
May. 16, 1990
Applicant:
Inventor:
Vishwanath V Subramaniam, Powell, OH (US);
Assignee:
The Ohio State University, Columbus, OH (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ; C23C / ; B32B / ;
U.S. Cl.
CPC ...
428408 ; 427 531 ; 427249 ; 423446 ;
Abstract
The invention relates to a method for forming a carbon film on a substrate by irradiating a carbon monoxide-containing gas with an emission from a carbon monoxide laser without irradiating the substrate with the laser emission. The carbon film can be diamond, amorphous carbon, or graphite and the carbon film can be C.sup.13 -enriched or pure C.sup.13 by varying the isotope content of the CO gas in the chamber and/or in the laser.