The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 1992
Filed:
Mar. 19, 1990
Hitachi, Ltd., Tokyo, JP;
Abstract
A continuous vacuum processing apparatus has a vacuum processing chamber and at least one auxiliary vacuum chamber connected to at least one of the upstream and downstream ends of the vacuum processing chamber as viewed in the direction of flow of a material to be processed. The apparatus further has a slit-type seal device provided in the auxiliary vacuum chamber and capable of conveying the material to be processed while sealing the vacuum processing chamber from exterior of the vacuum processing chamber. The seal device is provided with a guide member for guiding the material. Independent tensioning devices are provided in the vacuum processing chamber and the auxiliary vacuum chamber and capable of independently applying tensions to the portions of the material in the vacuum processing chamber and auxiliary vacuum chamber, so that a material which is not resistant to heat can be processed without being damaged.