The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 1992
Filed:
May. 09, 1989
Rosemary L Smith, Davis, CA (US);
Scott D Collins, Davis, CA (US);
Other;
Abstract
An interferometric-based pressure transducer is fabricated from two layers of silicon having different crystal orientations which have been processed using selective anisotropic etching to produce in one silicon layer a mirror surface and a groove that is aligned with the mirror, and a pressure-responsive membrane in the other layer. The layers are joined with the membrane opposite the mirror, and an optical fiber is secured in the groove so that light from the optical fiber is conveyed by the mirror surface between the membrane and the optical fiber. Conventional interferometric apparatus compares transmitted and received light in order to sense deformation of the membrane and thereby sense pressure.