The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 1992
Filed:
Jul. 10, 1990
Applicant:
Inventors:
Yukinobu Nishimura, Hyogo, JP;
Setsuhiro Shimomura, Hyogo, JP;
Nobutake Taniguchi, Hyogo, JP;
Kouji Tanimoto, Hyogo, JP;
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
F02M / ;
U.S. Cl.
CPC ...
123494 ; 36443105 ; 731182 ;
Abstract
A method of processing a signal of a thermal flow-rate sensor, provides a temperature monitor for monitoring a temperature at a representative point on a substrate support member; obtains the temperature at the representative point corresponding to the flow rate by use of the temperature monitor; and corrects an output of the sensor in accordance with a value corresponding to the temperature as well as a value corresponding to the temperature at the representative point when the flow rate is in a steady state.