The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 1992
Filed:
Sep. 14, 1988
Applicant:
Inventors:
Tatsuya Adachi, Tokyo, JP;
Masahiro Yamamoto, Tokyo, JP;
Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
2504922 ; 250398 ; 250309 ;
Abstract
A means is employed to blow a gas for forming a conductive film and a gas for forming an insulating film onto the surface of a specimen while it is being irradiated with an ion beam, in order to easily and quickly form a small conductive pattern and an insulating pattern in a laminated manner, and a means is employed to cut a pattern by the irradiation with an ion beam and to form a new electrically conductive pattern by blowing a gas while the pattern is being irradiated with the ion beam in order to accomplish an electric connection between the patterns, making it possible to locally cut or connect tiny patterns.