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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 5085166 B1

PDFFull Text
Date of Patent:
Feb. 04, 1992

Filed:

May. 07, 1990

Laser vapor deposition apparatus

Applicant:
Inventors:

Kazuhiro Oka, Amagasaki, JP;

Takeshi Morita, Amagasaki, JP;

Seigo Hiramoto, Amagasaki, JP;

Toshio Kagawa, Amagasaki, JP;

Assignee:

Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;

Attorney:

Morrison Law Firm

Primary Examiner:

Shrive Beck

Assistant Examiner:

Margaret Burke

Int. Cl.
CPC ...
C23C / ; C23C / ;
U.S. Cl.
CPC ...
118 501 ; 118620 ; 118723 ; 118726 ; 118727 ; 118719 ; 21912184 ; 21912186 ; 427 531 ;
Abstract

A laser vapor deposition apparatus includes a vacuum chamber which includes an exhaust port and in which a material to be vaporized and a substrate are enclosed, a laser beam source for irradiating the material to be vaporized with a laser beam so as to deposit from the material a desired compound onto the substrate, and a gas supply source which supplies to the surface of the material, a gas that can prevent changes in property of the material which could be caused by the laser beam irradiation.

Find Patent Forward Citations

Oka, Kazuhiro. (1992). Laser vapor deposition apparatus (U.S. Patent No. 5085166). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5085166

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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