The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 21, 1992

Filed:

Sep. 27, 1990
Applicant:
Inventors:

Hirofumi Miyamoto, Hachioji, JP;

Tsugiko Takase, Hachioji, JP;

Takao Okada, Hachioji, JP;

Shuzo Mishima, Hachioji, JP;

Hiroko Ohta, Hachioji, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250306 ; 250307 ;
Abstract

A scanning tunneling microscope includes an observation optical system for optically observing the surface of an object. The optical system is fixed on an optical system fixing member. The optical system is moved in a direction (Z-direction) vertical to the surface of the object by means of a motor, whereby the focal point of the optical system is adjusted. An STM measurement probe supported by an optically transparent member is disposed between the optical system and the object. When the object is optically observed, the probe is displaced from the focal point by means of a micrometer. Thus, an optical observation image of the surface of the object, which is not affected by the shadow of the probe, can be obtained. When the STM measurement is carried out, a probe unit enables the probe to scan the surface of the object, and an STM image is obtained by a conventional method.


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