The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 1992
Filed:
Dec. 05, 1990
Applicant:
Inventors:
Assignee:
Lumonics Inc., Kanata, CA;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S / ;
U.S. Cl.
CPC ...
372 86 ; 372 57 ;
Abstract
An excimer laser has a pair of main electrodes defining a lasing space, and a series of pairs of pre-ionization pins arranged alongside the main electrodes. These pins form preionization gaps for generating discharges that provide ultraviolet radiation to condition the gas in the lasing space. The invention consists of providing a tracker of insulating material between each pair of pins to bridge the gap and provide a tracking surface for the pre-ionization discharge.